Manufacturing and characterization of a thermoelectric energy harvester using the CMOS-MEMS technology

Journal

Micromachines

Journal Volume

6

Journal Issue

10

Pages

1560-1568

Date Issued

2015

Author(s)

Peng, S.-W.

Shih, P.-J.

Dai, C.-L.

DOI

10.3390/mi6101439

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/464353

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84946404169&doi=10.3390%2fmi6101439&partnerID=40&md5=9e5fce99d7ca5e7d3a218a64b9f02541

Type

journal article