Design of an Enabling Mechanism for Effective Yield Analysis Procedure
Date Issued
2007
Date
2007
Author(s)
Hsu, Shih-Jie
DOI
en-US
Abstract
Resource integration and reuse for the rapid yield ramp-up is a critical concern to the business strategies in manufacturing industries. Aiming at this issue, we select the yield analysis procedure (YAP) and its realization on engineering data analysis (EDA) system in a semiconductor fab as the problem conveyer. Through the study of current practices, three YAP problems are identified: low reusability of the YAP related knowledge, low quality of the one-step YAP decision, and low efficiency to realize the YAP plan on EDA system. The focus of this thesis is then on the knowledge integration and reuse for effective YAP planning and realization.
In order to enabling the effective YAP, this thesis focuses on the detail design and analysis of knowledge and process service from the perspective of knowledge chain integration. Knowledge service is to model both YAP and EDA knowledge at YAP guiding system and provide on-demand knowledge to engineers. The design of knowledge service consists of two tasks. First, design unified resource modeling for unified representation of YAP and EDA system knowledge. To achieve flexibility and scalability, semantic network is selected as the knowledge representation method. The critical yield analysis concepts and their relationships are modeled as various types of nodes and links in unified resource model. These yield analysis concepts can describe most YAP and EDA knowledge. Unified knowledge representation is critical for knowledge integration and reuse. The unified resource modeling enables the integration of YAP purpose planning and realization on EDA system. Second, extract new relationships among the yield analysis concepts in unified resource model via analyzing EDA system usage log. Two steps in this mechanism: 1. Extract EDA function connectivity through usage log mining. 2. According to the EDA function connectivity, the relationship of the yield analysis concept can be extracted because all EDA functions are described by the yield analysis concepts.
Process service is to support the multi-step-ahead process planning for proactive YAP decision makings. The design of process service consists of three successive mechanisms. The first mechanism, the easiest task, maps the purpose of a single YAP activity to corresponding EDA functions. Engineers can find required EDA function quickly and the EDA function usage rate can be improved by this mechanism. The EDA function enables the efficient YAP realization on EDA system. The second mechanism generates the full range of YAP planning tree based on the YAP knowledge in unified knowledge model. The YAP planning tree supports the multi-step-ahead planning and achieves seamless integration of engineer’s yield analysis thinking and EDA system execution. This mechanism enable the global YAP decision makings. The final mechanism, the most difficult task, is to extract situation assessment knowledge by composite report. In current practices, the situation assessment knowledge is implicit in engineer’s mind and hard to be extracted. To cope with the problem, we further design the composite report to help engineers summarize the findings in YAP and analyze the critical path on YAP planning tree. Utilize the benefits bring from composite report to encourage engineers keep their finding in system immediately after each EDA function execution. These engineer’s findings collected by composite report enable the effective extraction of situation assessment knowledge to remove the biggest obstacle to the effective YAP generation.
To achieve effective YAP planning and realization, this thesis designs five enabling mechanisms from the knowledge and process service perspective. The goal of this thesis is to enable the evolutions of YAP optimization based on these mechanisms.
Subjects
知識工程
知識鏈
知識整合與再利用
良率分析流程
knowledge engineering
knowledge chain
resource integration and reuse
yield analysis procedure
Type
thesis
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