Development and Application of A Diaphragm Micro-pump with Piezoelectric Device
Resource
the Journal of Microsystem Technologies (Springer),14(7),1001-1007.
Journal
Microsystem Technologies
Pages
1001-1007
Date Issued
2008-05
Date
2008-05
Author(s)
Ma, H. K.
Hou, B. R.
Wu, H. Y.
Lin, C. Y.
Gao, J. J.
Kou, M. C.
Abstract
In this study, a new type of thin, compact, and light weighed diaphragm micro-pump has been successfully developed to actuate liquid by the vibration of a diaphragm. The micro-diaphragm pump with two valves is fabricated in an aluminum case by using highly accurate CNC machine, and the cross-section dimension is 28 mm × 5 mm. Both valves and diaphragm are manufactured from PDMS. The amplitude of vibration by a piezoelectric device produces an oscillating flow and alters the chamber volume by the curvature change of a diaphragm. Several experimental set-ups for performance tests in a single micro-diaphragm pump, isothermal flow open system, and a closed liquid cooling system are designed and implemented. The performance of a one-side actuating micro-diaphragm pump is affected by the design of check valves, diaphragm, piezoelectric device, chamber volume, input voltage and frequency. The measured maximum flow rate of present design is 72 ml/min at zero total pump head in the range of operation frequency 70-180 Hz. © 2007 Springer-Verlag.
SDGs
Type
journal article