A Study of an innovative technology for manufacturing optical waveguides based on vacuum-assisted micromolding
Journal
Polymer - Plastics Technology and Engineering
Journal Volume
47
Journal Issue
11
Pages
1170-1173
Date Issued
2008
Author(s)
Abstract
In this study, we develop a vacuum-assisted photo resist filling technology for micro-structures by integrating the characteristics of PDMS soft mold, photo cure resist, and vacuum equipment. Together with soft mold, this technology can be adopted in the production of optical waveguide components. Conformal contact can be achieved on the material surface with PDMS soft mold. Meanwhile, it has a low surface free energy and won't stick to the resist during the filling. By vacuum pumping, the resist filling will be compact and complete. It increases the effective filling area significantly.
SDGs
Type
journal article