Design of Microelectrode Arrays for Electrostatic Microactuators and Capacitive Microsensors
Resource
Journal of Intelligent Material Systems and Structures,9,95-103.
Journal
Journal of Intelligent Material Systems and Structures
Journal Issue
9
Pages
95-103
Date Issued
1998-02
Date
1998-02
Author(s)
Peizen Chang, Chienliu Chang,
Kaihsiang Yen