Ultra-deep LIGA process and its applications

Resource

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 467-468: 1192-1197

Journal

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 467-468: 1192-1197

Pages

-

Date Issued

2001

Date

2001

Author(s)

Cheng, Y.

Shewa, B. -Y.

Chyu, MK

Chen, PH

URI

Type

journal article

File(s)

Name

28.pdf

Size

233.6 KB

Format

Adobe PDF

Checksum

(MD5):00e68710e27fbea4ff7754b6b2b7659d