三次元側向阻尼效應之研究與硬體描述語言模型之建立
Date Issued
2003
Date
2003
Author(s)
DOI
912218E002021
Abstract
In this work, a fast algorithm of generating accurate
time-domain macromodels of viscous lateral damping for
three-dimensional MEMS geometries is described. A
three-dimensional finite-difference (FDM) Stokes flow
solver for simulating lateral damping effects was developed.
The system matrices generated by the solver was then
reduced to low-order macromodels that can be easily
inserted into a system-level modeling simulators, such as
Saber, Simulink or SPICE for transient and frequency
analysis. The macromodels have proved to be about threeorder-
of-magnitude as efficient as the FDM solver, while
preserve the 3-D edge effects that usually require expensive
3-D BEM or FEM calculations. Experimental results of
quality factors for comb-drive devices demonstrated that
the error of the results estimated by the macromodels is
within 15%.
Subjects
lateral viscous damping
model order reduction
macromodel
comb drive
Publisher
臺北市：國立臺灣大學機械工程學系暨研究所
Type
report
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