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A Precision Piezodriven Micropositioner Mechanism with Large Travel Range
Resource
The Review of Scientific Instruments 69(4): 1785-1791
Journal
The Review of Scientific Instruments
Journal Issue
4
Pages
1785-1791
Date Issued
1998
Date
1998
Author(s)
Chang, S. H.
Du, B. C.
Type
journal article
File(s)
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Name
13.pdf
Size
203.9 KB
Format
Adobe PDF
Checksum
(MD5):cf2711e35da753631ca0786cb5241743