The Study of Nano Materials for Gray-Scale Masks and Photonic Crystals Fabrications
Date Issued
2005
Date
2005
Author(s)
Lin, Yan-Chen
DOI
zh-TW
Abstract
In this thesis there are two topics in our research. First we will discuss the property of epoxy resin resist and make an application in the fabrications of gray-scale masks. Secondarily we will fabricate 3D photonic crystals, i.e. opal structures by monodispersed colloidal spheres, and discuss the property of photonic band-gap.
Owing to the general manufacture of gray-scale masks has some disadvantage, such as insufficient resolution, high cost, and alignment errors in the transition etching, we will bring up a design to fabricate gray-scale masks by simple lithographic process. Since the epoxy resin resist has some superior characteristics in mechanical and thermal property, and provides oblique structure in nanofabrications, we can fabricate gray-scale masks with epoxy resin resist. First we will realize the optical property of epoxy resin resist, and find out the fabrication parameters of gray-scale masks in different exposure sources of lithography process.
Because of the weak absorption at I-line and G-line, we try to add some nano materials with absorption property and adjust the parameters of lithographic process. We can use epoxy resin resist to fabricate gray-scale masks at I-line and G-line. In addition, with adding nano materials we will discuss the resist property of epoxy resin in the electron beam lithography. At the same time we will discuss the etching property with adding nano materials and compare the etching selectivity and etching rate with poly-silicon.
For opal structures with 3D photonic crystals characteristic we first observe the band-gap property of opal in different conditions and find out the better quality of opal. In addition we mix monodispersed colloidal spheres with two different diameter to fabricate binary opal. By the measurement in this experiment and the calculations in the theory we can tune the band-gap site with less change. At the same time we will suppose the distribution of binary opal and use scanning electronic microscopy to observe, we can test and verify our suppose.
Subjects
灰階光罩
奈米材料
光子晶體
蛋白石結構
gray-scale masks
nano-materials
photonic crystals
opal structure
Type
thesis
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