A CMOS surface micromachined pressure sensor

Journal

Journal of the Chinese Institute of Engineers, Transactions of the Chinese Institute of Engineers,Series A/Chung-kuo Kung Ch'eng Hsuch K'an

Journal Volume

22

Journal Issue

3

Pages

375-380

Date Issued

1999

Author(s)

Dai, C.-L.

DOI

URI

URL

Type

journal article