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Eight-phase-level diffractive microlens for beam splitting using LIGA-like process
Resource
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS,45(4A),2817-2823.
Journal
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS
Journal Volume
45
Journal Issue
4a
Pages
2817-2823
Date Issued
2006
Date
2006
Author(s)
Yang, J. J.
Liao, Y. S.
Chen, C. F.
Type
journal article