Research on the Vertical Scanning of White-Light Interferometry
Date Issued
2004
Date
2004
Author(s)
Yeh, Yi-Lin
DOI
zh-TW
Abstract
This study aims to establish the 3D profile measurement techniques of white-light interferometry with large vertical and horizontal measuring ranges. The purpose includes a complete investigation of the SIS-1000 (SNU Precision Company) surface profilometer for its operation principles and component specifications.
The core of the research is to develop an effective methodology for large-range and long-depth 3D profile measurement with nano-scale resolution and accuracy. The measuring method includes vertical scanning and image merging method (Geomagic Studio) by using SIOS laser interferometer for the purpose of precision positioning. The proposed “enhanced vertical scanning method” combines traditional vertical scanning with image merging method. Along with the outcome of experiments, this achieves the perfect ability for 3D reconstruction techniques.
Subjects
垂直掃描
三維影像疊合
Vertical Scanning method
image merging method
Type
thesis
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