Emitting 1530 nm light from mixture of Er 2O 3, P 2O 5 nanoparticles and spin-on-glass on silicon
Journal
Proceedings of SPIE - The International Society for Optical Engineering
Journal Volume
5723
Pages
89-96
Date Issued
2005
Author(s)
Abstract
We introduce a new fabricating technique that forms a light emitting layer on silicon wafer. This emitting layer could emit light at 1530nm. We mix the Er2O3 nanoparticles with spin-on glass, then deposit this mixed solution onto silicon wafer. It emits 1530nm light because Er2O3 nanoparticles release Er3+ into glass at high temperature. The manufacturing process is very simple and low cost. We also add P2O5, Si, Al, and Ag nanoparticles in order to modify the physical characteristics and light emission efficiency.
SDGs
Type
conference paper