Modeling, scheduling, and prediction for wafer fabrication: queueing colored Petri-net and GA based approach

Resource

Robotics and Automation, 2002. Proceedings. ICRA '02. IEEE International Conference on

Journal

IEEE International Conference on Robotics and Automation, 2002

Pages

-

Date Issued

2002-05

Date

2002-05

Author(s)

Huang, An-Chih

Lin, Ming-Hung

DOI

DOI

N/A

URI

Type

journal article

File(s)

Name

01013717.pdf

Size

693.24 KB

Format

Adobe PDF

Checksum

(MD5):12d152db695c28740e48b148dae21d16