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Petri-net and GA based approach to modeling, scheduling, and performance evaluation for wafer fabrication
Resource
Robotics and Automation, 2000. Proceedings. ICRA '00. IEEE International Conference on
Journal
2000 IEEE International Conference on Robotics and Automation
Pages
-
Date Issued
2000-04
Date
2000-04
Author(s)
DOI
N/A
Type
conference paper
File(s)
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Name
00845245.pdf
Size
611.95 KB
Format
Adobe PDF
Checksum
(MD5):f094402055d76bd06eb4c76da8062fc2