Acoustic Applications of GaN and AlGaN layered structure
Date Issued
2005
Date
2005
Author(s)
Chen, Yu-Heing
DOI
zh-TW
Abstract
Surface acoustic wave (SAW) devices have been widely used in modern communication technology due to its small size and better performance in the frequency above gigahertz.
Therefore, layered-structure materials have become more and more popular in recent years because the high acoustic speed they have is more suitable for the fabrication of Ultra-high frequency (>10Ghz) SAW devices.
We have successfully fabricated SAW filters using GaN/Sapphire and AlGaN/GaN/Sapphire layered structures. By applying Ni/Au Schottky contact for electrodes, the insertion loss can be decreased compared with which using aluminum for electrodes.
The dispersion relation of sound velocity in the layered structure has been observed in our experiments and agree with the theoretical model also has been established by the matrix method.
Last but not the least, in our experiments we have found a Sezawa mode acoustic wave which has high speed up to 9784m/s.This speed is almost triple to the usual material like quartz or lithium niobate and it is suitable for the communication technology in the future.
Subjects
氮化鎵
氮化鋁鎵
表面聲波
頻散
GaN
AlGaN
SAW
dispersion
Type
thesis
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