Development of a low cost Micro-CMM for 3D Micro/nano Measurements
Resource
Measurement Science & Technology,17,524-532.
Journal
Measurement Science Technology
Journal Issue
17
Pages
524-532
Date Issued
2006-01
Date
2006-01
Author(s)
Fan, K.C.
Fei, Y. T.
Yu, X. F.
Chen, Y.J.
Wang, W.L.
Chen, F.
Type
journal article