Oriented AFM Scanning on a Large Sample with Cooperative Rotating Stage and Auxiliary Optical Microscopy
Journal
IFAC-PapersOnLine
Journal Volume
55
Journal Issue
27
Date Issued
2022-09-01
Author(s)
Chen, Huang Chih
Abstract
Atomic force microscope (AFM) is a powerful tool capable of constructing accurate 3-D surface profiles at a nanometer resolution. However, the scanning area of the AFM is limited by the piezo-scanner. Hence, this will restrict the AFM from scanning those applications to large samples. Moreover, some features (e.g., strip shape) orientation relative to the AFM scanning direction is necessary to be considered. To address these issues, the AFM system combined with a rotation stage and a long-range stage is constructed. Besides, an automatic method to move the oriented scan region into the AFM workspace is provided through the assistance of an optical microscope (OM). Finally, the result shows that the AFM scanning on large samples is achievable.
Subjects
Atomic force microscope | large samples | optimized rotating center | oriented features
Type
conference paper