Detection of Anti-epileptic Drug Valproic Acid By Thermally Self-Compensated CMOS BioMEMS Microcantilever
Date Issued
2014
Date
2014
Author(s)
Li, Chung-Hsien
Abstract
With the growing interest and fast development in bio-nanotechnology, biosensing tools have been moving towards miniaturization, high sensitivity, portability and wireless networking. In this study, piezoresistive microcantilever biosensor is made with the foundry process by TSMC. The sensor manufacturing technology utilizes 0.35 um 2P4M CMOS process with post MEMS processes of silicon dry etching, and with post BioMEMS process of gold metallization. Meanwhile, this biosensing mechanism is based on protein-drug recognition, which results in conformational change and thus induced cantilever deflection.
However, thermal effect is the most important issue when it comes to detection of biomarker by piezoresistive microcantilever. Only 1 celcius degree change may override the real bio signal. As a result, the self-compensation system of thermal effect is developed in this study. In this thermal effect of the cantilever, the temperature coefficient of resistance (TCR) effect was about 7 times larger than the bimorph effect. Finally, thermal effect of a CMOS BioMEMS microcantilever under room temperature and fluctuated temperature environment can be eliminated by the thermal compensation system.
The detection of the anti-epileptic drug valproic acid concentration of 50 μg/ml、75 μg/ml and 100 μg/ml was achieved by a thermally compensated CMOS BioMEMS microcantilever. Meanwhile, the comparison and limitation result to the conventional method PETINIA was conducted. The values give a promising result for microcantilever biosensor to be further developed on the wireless point-of-care system.
Subjects
熱效應
壓阻式微懸臂樑
CMOS BioMEMS
丙戊酸
Type
thesis
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