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College of Engineering / 工學院
Mechanical Engineering / 機械工程學系
A Linnik scanning white-light interferometry system using a MEMS digital-to-analog converter
Details
A Linnik scanning white-light interferometry system using a MEMS digital-to-analog converter
Journal
Eurosensors 2010
Date Issued
2010
Author(s)
H.-H. Liao
Y.-J. Yang
YAO-JOE YANG
URI
https://scholars.lib.ntu.edu.tw/handle/123456789/587755
Description
Linz, Austria
Type
conference paper
