A Quick-Settling Enhancement-Mode Resoswitch
Journal
IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS)
Part Of
38th IEEE International Conference on Micro Electro Mechanical Systems
Start Page
193
End Page
196
Date Issued
2025-01-19
Author(s)
Abstract
This work demonstrates for the first time a quick settling enhancement mode MEMS resoswitch that alleviates the lengthy transient response seen in conventional resoswitches by stiffness engineered output electrodes for high bit-rate applications. Particularly, instead of using typical rigid output electrodes, this work adopts compliant arc-beam structures to form a normally closed electrical path that bypasses the shared mechanical and electrical contact unavoidable in regular resoswitches. This proposed output electrode design allows stiffness controlled soft landing and therefore stable electrical conduction regardless of the varying mechanical contact force originated from the resonant structure. Doing so greatly reduces the transient time of a 125-kHz resoswitch by 5 folds, from 1 ms to 0.2 ms, without the need for input waveform modification required for the pre-energization technique that has previously been shown to successfully increase the bit-rate of resoswitches.
Event(s)
38th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2025, Kaohsiung, 19 January 2025 through 23 January 2025. Code 207710
Subjects
CMOS-MEMS
comb-drives
impact dynamics
MEMS resonator
nonlinearity
Resoswitch
Publisher
IEEE
Type
conference paper