SiO 2 thickness dependence of C-V dispersion in stacked Al/HfO 2/SiO 2/4H-SiC capacitor

Journal

ECS Transactions

Journal Volume

45

Journal Issue

3

Pages

209-215

Date Issued

2012

Author(s)

DOI

10.1149/1.3700886

URI

http://www.scopus.com/inward/record.url?eid=2-s2.0-84869053040&partnerID=MN8TOARS

http://scholars.lib.ntu.edu.tw/handle/123456789/370333

Type

conference paper