The thickness difference method for measuring the thermal conductivity of thick films

Journal

Journal of Microelectromechanical Systems

Journal Volume

19

Journal Issue

4

Pages

895-902

Date Issued

2010

Author(s)

Chang T.-Y.

Chien H.-C.

Sun W.-C.

Yao D.-J.

DOI

10.1109/JMEMS.2010.2051534

URI

https://www.scopus.com/inward/record.uri?eid=2-s2.0-77955401047&doi=10.1109%2fJMEMS.2010.2051534&partnerID=40&md5=c36bf41c98d589b586812ffdf0d4cc24

https://scholars.lib.ntu.edu.tw/handle/123456789/411148

http://ntur.lib.ntu.edu.tw/bitstream/246246/244275/-1/366.pdf

Type

journal article