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  4. On The Design and Fabrication of Anti-static-charge Ignition Chip
 
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On The Design and Fabrication of Anti-static-charge Ignition Chip

Date Issued
2010
Date
2010
Author(s)
Lin, Chen-Sheng
URI
http://ntur.lib.ntu.edu.tw//handle/246246/250062
Abstract
MEMS igniting chip is an outstanding electro-actuating device with low initiating energy, great igniting power, and high stability. Nowadays, MEMS igniting chip has been widely applied to various fields, such as automobile, aeronautics, and defense industries. In this thesis, the modified igniting chips which could both sustain electro-static discharges and satisfy the demand of low-energy ignition are investigated. The anti-static-charge ignition chips were fabricated via MEMS technologies. On a silicon wafer, the metal bridge was overlaid on the two opposite-direction diodes to form the integrated chip. By doing so, when electro-static charges apply to the chip, the static charge current could flow through diodes instead of the metal bridge, consequently preventing the unexpected igniting. Besides, in order to test whether the ignition chip possesses the anti-static-charge capability or not, the simulation software Pspice for electronic circuits was used to verify its performance: The results evidence that anti-static-charge ignition chip could successfully reduce the heat generated on the metal bridge. In experiments, a discharging circuit with a high-voltage was constructed carry out the measurement of static charge discharging. Moreover, by using a sensitive photodiode to detect the ignition sparkling, the signal of photodiode evidence the ignition time of the anti-static-charge ignition chip when excited by a low voltage of 35 V charged in a 33μF capacitor. In summary, the result indicated that the anti-static-charge ignition chip could release static-electro discharges, without being ignited by static electricity. Meanwhile, it could be ignited with low energy in a short time, and the activating time is 1.5μs on average.
Subjects
Anti-static-charge
ignition chip
metal bridg
MEMS process
Type
thesis
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ntu-98-R96543004-1.pdf

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