Thick and Thermally Isolated Si Microheaters for Microfabricated Preconcentrators

Journal

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Journal Volume

21

Journal Issue

1

Pages

274-279

Date Issued

2003-01

Author(s)

WEI-CHENG TIAN

S. W. Pang

DOI

URI

Type

journal article