Design, test and qualification of stiction-free MEMS optical switches

Journal

Pacific Rim Conference on Lasers and Electro-Optics, CLEO

Journal Volume

1

Date Issued

2003

Author(s)

Su, G.-D.J.

Jiang, F.

Chiu, E.

Avakian, A.

Dickson, J.

Jia, D.

Tsao, T.

GUO-DUNG JOHN SU

DOI

10.1109/CLEOPR.2003.1274564

URI

http://www.scopus.com/inward/record.url?eid=2-s2.0-18944371574&partnerID=MN8TOARS

http://scholars.lib.ntu.edu.tw/handle/123456789/303140

Type

conference paper