Initiation of Energetic Materials by Low-energy Solid State Igniting Chip
Date Issued
2006
Date
2006
Author(s)
Hung, Chiu-Lung
DOI
en-US
Abstract
MEMS igniting chip is an excellent electro-actuating device to initiate energetic materials with exceptional features of high-stability, low initiating energy, great igniting power, and batch-fabricating capability. Igniting chips are widely applied in automobile, aeronautics, space, medical, and defense industries. In this thesis, several novel metal bridges were designed and fabricated. The transient thermal processes of ignition detonated by charged capacitors were simulated to investigate the igniting time of igniters on the bases of numerical analysis utilizing finite element methods (FEM).
A firing bridge of metal film was further deposited on the silicon substrate by a series of lithography, deposition, PR lifting, and etching. The performances of ignitions were measured by photoresistors which responded instantaneously with the explosive light of ignitions. The experimental results demonstrated that the thin-film solid state igniting chips possess capability of microsecond-scale ignition. The melting and evaporating time of golden bridges were also obtained in the measurements. Moreover, the average activating time of igniters with energetic materials was about 180μsec. The experimental data are compared well with the analytical results which provide pertinent bases for choosing proper capacitors to ignite solid bridges.
Subjects
低能量點火晶片
薄膜金屬電橋
有限元素法
微機電點火器
Low-energy igniting chip
thin-film metal bridge
finite element method
MEMS igniter
Type
thesis
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