Atom-to-atom interactions for atomic layer deposition of trimethylaluminum on Ga-rich GaAs (001)-4 ? 6 and As-rich GaAs(001)-2 ? 4 surfaces: A synchrotron radiation photoemission study

Journal

Nanoscale Research Letters

Journal Volume

1

Pages

1????8

ISBN

10.1186/1556-276X-8-169

Date Issued

2013

Author(s)

Pi, T.-W.

Lin, H.-Y.

Liu, Y.-T.

Lin, T.-D.

Wertheim, G.K.

Kwo, J.

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/443336

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84878763194&doi=10.1186%2f1556-276X-8-169&partnerID=40&md5=eba4b657c469deac52de9ba43fe3adba

Type

journal article