微機電與奈米系統多功光學顯微量測儀之研製(3/3)
Date Issued
2005-07-31
Date
2005-07-31
Author(s)
DOI
932212E002008
Abstract
With the rapid advancement of nanotechnology, many industries have focused their
research efforts to products of miniature size. It is to be noted that high-precision
metrology is the driving force that propels miniature product forward. To further
advance this line of research, there is an imminent need to develop a metrology system
that can perform dynamic measurement through a microscopic system. In other words,
the goal of this research is to develop an optical metrology system that can measure
full-field and dynamic nanometer vibrations. By integrating an innovative optical
configuration and a newly developed signal algorithm, the above-mentioned goals were
completed successfully during the course of this research.
In this dissertation, electronic speckle pattern interferometry (ESPI) with high speed
CCD camera was adopted to achieve full-filed deformation measurement. By means of
short exposure time and precise time control, a series of transient information could be
obtained. Image processes including (5,1) phase shifting technology, direct correlation
method, noise reduction median filter, and path-independent phase unwrapping method
were all integrated to reconstruct surface profile of specimen. Moreover, based on
circular polarization interferometer and quadrature signal phase decoded method, laser
Doppler interferometry was combined with ESPI system successfully to pursue
multi-functional optical metrology system. Besides, an innovative time-stepped phase
shifting method has also been proposed. This newly developed process essentially
circumvents the de-correlation problem faced by incorporating ESPI technology into
microscopic system. The newly developed time-stepped quadrature phase shifting
method can even remove the phase shifting device so as to thoroughly improve the
accuracy.
With regard to the experimental achievements, the optimal optical configuration has
been constructed according to the optical simulation results. In addition, the complete
experimental process control system and signal image analysis interface have also been
developed. In summary, the vibration measurement results obtained from a
piezoelectric plate verifies the performance of the innovative optical metrology system
disclosed and accuracy of the newly developed algorithm adopted.
Publisher
臺北市：國立臺灣大學應用力學研究所
Type
report
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