X-Ray absorption studies of boron-carbon-nitrogen (BxCyNz) ternary alloys
Journal
Diamond and Related Materials
Journal Volume
13
Journal Issue
4-8
Pages
1553-1557
Date Issued
2004
Author(s)
Ray, S. C.
Tsai, H. M.
Chiou, J. W.
Jan, J. C.
Kumar, K.
Pong, W. F.
Chien, F. Z.
Tsai, M. H.
Chattopadhyay, S.
Chen, L. C.
Chien, S. C.
Lee, M. T.
Abstract
X-Ray diffraction (XRD) and B, N and C K-edges X-ray absorption near-edge structure (XANES) measurements have been performed to study the BxCyNz ternary compounds. XRD reveals that the films contain carbon nitride, boron carbide, and boron nitride compounds. The combination of B, N and C K-edges XANES results reveal the presence of B-N, B-C, N-C, and C-N local bonding structures in Bx CyNz, indicating that boron-carbon-nitride thin films have a ternary phase, rather than a mixture of segregated binary phases. © 2003 Elsevier B.V. All rights reserved.
SDGs
Type
journal article