GaAs MOSFET with oxide gate dielectric grown by atomic layer deposition
Journal
Electron Device Letters, IEEE
Journal Volume
24
Journal Issue
4
Pages
209-211
Date Issued
2003
Author(s)
Ye, PD
Wilk, GD
Kwo, J
Yang, BAYB
Gossmann, H-JL
Frei, MAFM
Chu, SNG
Mannaerts, JP
Sergent, MASM
others
Type
journal article