Dual-axis Maglev guiding system modeling and controller design for wafer transportation

Resource

Decision and Control, 1999. Proceedings of the 38th IEEE Conference on

Journal

38th IEEE Conference on Decision and Control

Pages

-

Date Issued

1999-12

Date

1999-12

Author(s)

Chen, Mei-Yung

Wang, Ming-Jyh

DOI

DOI

N/A

URI

Type

journal article

File(s)

Name

00831324.pdf

Size

538.49 KB

Format

Adobe PDF

Checksum

(MD5):91719ce134504e556a2475f0bdffe91a