Investigation on the differential quadrature Fabry-Pérot interferometer with variable measurement mirrors
Journal
Applied Sciences (Switzerland)
Journal Volume
10
Journal Issue
18
Date Issued
2020
Author(s)
Abstract
Due to the common path structure being insensitive to the environmental disturbances, relevant Fabry-P?rot interferometers have been presented for displacement measurement. However, the discontinuous signal distribution exists in the conventional Fabry-P?rot interferometer. Although a polarized Fabry-P?rot interferometer with low finesse was subsequently proposed, the signal processing is complicated, and the nonlinearity error of sub-micrometer order occurs in this signal. Therefore, a differential quadrature Fabry-P?rot interferometer has been proposed for the first time. In this measurement system, the nonlinearity error can be improved effectively, and the DC offset during the measurement procedure can be eliminated. Furthermore, the proposed system also features rapid and convenient replacing the measurement mirrors to meet the inspection requirement in various measuring ranges. In the comparison result between the commercial and self-developed Fabry-P?rot interferometer, it reveals that the maximum standard deviation is less than 0.120 μm in the whole measuring range of 600 mm. According to these results, the developed differential Fabry-P?rot interferometer is feasible for precise displacement measurement. ? 2020 by the authors.
Type
journal article