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College of Management / 管理學院
Business Administration / 工商管理學系暨商學研究所
Modeling, Optimization and Control of Spatial Uniformity in Manufacturing Processes
Details
Modeling, Optimization and Control of Spatial Uniformity in Manufacturing Processes
Journal
IEEE Transactions on Semiconductor Manufacturing
Journal Issue
6
Pages
41-57
Date Issued
1993-02
Author(s)
RUEY-SHAN GUO
E. Sachs
DOI
10.1109/66.210657
URI
http://scholars.lib.ntu.edu.tw/handle/123456789/304594
Type
journal article
