Sacrificial structure for effective sapphire substrate liftoff based on photoelectrochemical etching

Journal

IEEE Photonics Technology Letters

Journal Volume

27

Journal Issue

7

Pages

770-773

Date Issued

2015

Author(s)

Hsieh, C.

Su, C.-Y.

Weng, C.-M.

Chi, T.-T.

Kiang, Y.-W.

CHIH-CHUNG YANG

YEAN-WOEI KIANG

DOI

10.1109/LPT.2015.2392108

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/497827

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84924917993&doi=10.1109%2fLPT.2015.2392108&partnerID=40&md5=982795175ec41b2158fcd926d3e612e3

Type

journal article