ZnO/ST-cut Quartz震盪式層狀表面聲波黏度感測器
ZnO/ST-cut Quartz Resonator Type Layered SAW Viscosity Sensor
Date Issued
2005
Date
2005
Author(s)
Huang, Zhi-Da
DOI
en-US
Abstract
In this work, we aim at measuring and discussing the performance difference between ZnO/ST-cut quartz based Love wave resonator type liquid sensor with different normalized thickness. The devices were designed such that they share the same ZnO film identical material properties. Five Love wave acoustic devices based on ZnO/90˚ rotated ST-quartz layered structure with different normalized are fabricated and incorporated with Polydimethylsiloxane (PMDS) flow cell. This allows a tiny controlled amount of analyte to be confined solely upon the sensing area between the IDTs of our Love wave sensors, preventing unwanted electric interactions with IDTs. This system is designed to be compatible with commercially available Flow Injection Analyzers (FIA) for accurate and efficient delivery of minuscule amounts of test samples into our sensor. Finally, we put this system and our sensors to the test by using it for viscosity sensing of different solutions.
Subjects
表面聲波
拉福波
感測器
黏滯性
PDMS
流穿式樣品槽
Surface acoustic wave
Love wave
resonator
viscosity sensing
flow cell
Type
thesis
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