Study of Dielectric Microdisks and their Waveguide Coupling
Date Issued
2014
Date
2014
Author(s)
Jhuang, Heng-Jhe
Abstract
In this thesis we designed three passive dielectric microdisk waveguide coupling structures and active silicon nanocrystal microdisks.
Firstly, in silicon dioxide / silicon structure, waveguides cannot properly
guide because of the substrate radiation loss.
Secondly, in benzocyclobutene (BCB) / silicon dioxide / silicon structure, we verified light is guided in the waveguide. However, the WGMs (whispery gallery modes) hadn’t be observed in the spectrum.
In addition, etching process encountered two bottlenecks waveguide instability and insufficient adhesion between BCB and silicon dioxide.
Thirdly, in the silicon nitride / silicon dioxide / silicon structure, quality
factor of a 10 micron microdisk in diameter is about 2500, while those of
12 and 14 micron microdisks are 3100 and 3600, respectively. In the
waveguide width tuning measurement, we observed the mode signal in transmission spectra with waveguide width less than 1 micron. In the gap tuning measurement, we found the quality factor increases with gap widened, and the deepest transmission dip at 150nm that it corresponds
critical coupling.
Finally, we used tapered-fiber measurement system to investigate the characteristics of silicon nanocrystal microdisks. The quality factor of a
silicon nanocrystal microdisk with 15 micron in diameter is about 6000.
Subjects
微碟型
雷射
波導
Type
thesis
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