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College of Science / 理學院
Applied Physics / 應用物理研究所
Nanolithography on silicon surface using a tuning fork STM/AFM
Details
Nanolithography on silicon surface using a tuning fork STM/AFM
Date Issued
2001-01
Date
2001-01
Author(s)
Lin, H. Y.
Fan, C. C.
Tsai, D. P.
Chien, F. S.-S.
Gwo, S.
URI
http://ntur.lib.ntu.edu.tw//handle/246246/231728
Publisher
Optical Engineering for Sensing and Nanotechnology, SPIE Pro