Design and Control of Phase Detection Mode Atomic Force Microscope for Cell Contour Reconstruction in Three-Dimension
Date Issued
2012
Date
2012
Author(s)
Chen, Jyun-Jhih
Abstract
Atomic force microscope (AFM) is equipped with height recognition with nano and sub-nano meter scale, and it can accurately build three-dimensional (3D) imaging of samples with micro-structure. In this thesis, we propose a phase detection mode atomic force microscope (PM-AFM) which is mainly applied to reconstruct 3D cell contour. In measuring system, here we use DVD pick-up-head to measure the cantilever deflection. This kind of design can minimize measuring system and hence reduce measuring error. In scanning system, we use piezoelectric stages with nanometer resolution as the planar scanner.
For the sake of accurately obtaining the contour of tender cells, first we design an MIMO adaptive double integral sliding mode controller in xy-plane to overcome the system uncertainties, cross coupling, hysteresis effect, and disturbance, which improves the positioning accuracy and provides precision cell size. Second, in z-axis we design an adaptive complementary sliding-mode controller to improve the scanning accuracy and to overcome the inconvenience for user with traditional proportional-integration controller. Besides, we use phase feedback signal, which features with higher sensitivity and faster response. Cooperated with constant force feedback scheme in z-axis, we can obtain a better quality of topographical scan which alleviating risk to damage the samples.
Subjects
相位偵測式原子力顯微鏡
適應性控制
順滑模式控制
光碟機讀取頭
Type
thesis
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