Dynamic performance of micro coordinate measurement probe

Resource

IEEE Review of Advances in Micro, Nano, and Molecular Systems,1,477-478.

Journal

IEEE Review of Advances in Micro

Journal Issue

1

Pages

477-478

Date Issued

2006-05

Date

2006-05

Author(s)

Shih, P. J.

Shih, W. P.

Lin, T. H.

Huang, H. P.

URI

Type

journal article

File(s)

Name

913.pdf

Size

23.45 KB

Format

Adobe PDF

Checksum

(MD5):04e4186d66c914cb6ae5d2630aba1884