Generalized formula for curvature radius and layer stresses caused by thermal strain in semiconductor multilayer structures
Resource
J. Appl. Phys.,54,83-85.
Journal
J. Appl. Phys
Journal Issue
54
Pages
83-85
Date Issued
1983-01
Date
1983-01
Author(s)
Feng, Z.C.
Liu, H.D.
Type
journal article