Design and control of a long-stroke nano-positioning stage

Journal

2013 IEEE/SICE International Symposium on System Integration

Pages

138-143

ISBN

9.78148E+12

Date Issued

2013

Author(s)

Wu R.C.

Tsai I.H.

Yen J.Y.

DOI

10.1109/sii.2013.6776643

URI

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84902506113&partnerID=40&md5=c2ad5e884023982bce88729756890107

https://scholars.lib.ntu.edu.tw/handle/123456789/412600

Publisher

IEEE Computer Society

Type

conference paper