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College of Engineering / 工學院
Mechanical Engineering / 機械工程學系
Design and control of a long-stroke nano-positioning stage
Details
Design and control of a long-stroke nano-positioning stage
Journal
2013 IEEE/SICE International Symposium on System Integration
Pages
138-143
ISBN
9.78148E+12
Date Issued
2013
Author(s)
Wu R.C.
Tsai I.H.
Wang F.C.
Yen J.Y.
URI
https://www.scopus.com/inward/record.uri?eid=2-s2.0-84902506113&partnerID=40&md5=c2ad5e884023982bce88729756890107
https://scholars.lib.ntu.edu.tw/handle/123456789/412600
Publisher
IEEE Computer Society
Type
conference paper