Tunneling piezoresistive tactile sensing array fabricated by a novel fabrication process with membrane filters

Journal

IEEE International Conference on Micro Electro Mechanical Systems

Journal Volume

2015-February

Journal Issue

February

Pages

249-252

Date Issued

2015

Author(s)

Ma, C.-W.

Lin, T.-H.

Yang, Y.-J.

DOI

10.1109/MEMSYS.2015.7050935

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/448470

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84931058715&doi=10.1109%2fMEMSYS.2015.7050935&partnerID=40&md5=32db991e8cdc1ce1726a46858fcd6109

Type

conference paper