Fabrication of gold sub-wavelength pore array using gas-assisted hot embossing with anodic aluminum oxide (AAO) template

Resource

MICROELECTRONIC ENGINEERING, 88(6), 909-913

Journal

Microelectronic Engineering

Pages

909-913

Date Issued

2011

Date

2011

Author(s)

Chang, Wei-Yi

Wu, Jing-Tang

Lin, Kai-Heng

Lee, Kuang-Li

Wei, Pei-Kuen

DOI

URI

Type

journal article

File(s)

Name

248.pdf

Size

23.45 KB

Format

Adobe PDF

Checksum

(MD5):b872fa7da24ffabd6354d88cd6f9fa27