Model Estimation for Multiple Switching Control: Applied to a Nano-Precision Stage
Journal
2024 SICE Festival with Annual Conference, SICE FES 2024
Series/Report No.
2024 SICE Festival with Annual Conference, SICE FES 2024
Part Of
2024 SICE Festival with Annual Conference, SICE FES 2024
Start Page
822
End Page
825
ISBN
9784907764838
Date Issued
2024-08-27
Author(s)
Abstract
This paper develops a model estimation mechanism and integrates it with multiple switching control. We then apply the integrated control mechanism to a nm-precision piezoelectric transducer (PZT) stage to improve its positioning precision. The multiple-switching control can forecast future system responses and select the optimal control sequence to improve the precision-positioning performance. The model estimation mechanism can update the model in real time to improve the prediction accuracy. We implement the control architecture to a PZT stage. The model estimation mechanism can improve the stage's positioning accuracy from the simulations and experiments.
Event(s)
2024 SICE Festival with Annual Conference, SICE FES 2024, Kochi City, 27 August 2024 through 30 August 2024. Code 205495
Subjects
Control Switching
Model Estimation
Precision
PZT Stage
Robust Control
Type
conference paper