Robust Control of a Two-Axis Piezoelectric Nanopositioning Stage
Date Issued
2010
Date
2010
Author(s)
Hsieh, Chin-Hui
Abstract
This thesis applies robust control to a two-axis piezoelectric nanopositioning stage. As semiconductor technology develops, the precision requirement for positioning platforms is increasingly stringent. Because the traditional mechanical transmission structure can no longer meet the requirements of high precision, we use piezoelectric actuators to drive the mechanism. The piezoelectric material can achieve precise position control because of it`s high resolution, high accuracy and large driving force. But the piezoelectric material has non-linear dynamic characteristics, such as hysteresis, that might degrade the system performance. Therefore, closed-loop controls are used to improve system stability and performance.
At first, we identify the stage and define the nominal plant, where the nonlinear factors are regarded as system uncertainties. Using the nominal plant, we then design robust controllers. Finally, the designed controllers are implemented to the system for experimental verification. The results demonstrate the effectiveness of the robust controllers.
At first, we identify the stage and define the nominal plant, where the nonlinear factors are regarded as system uncertainties. Using the nominal plant, we then design robust controllers. Finally, the designed controllers are implemented to the system for experimental verification. The results demonstrate the effectiveness of the robust controllers.
Subjects
semiconductor
nanopositioning stage
piezoelectric material
hysteresis
robust control
identification.
Type
thesis
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