Design and Control of Novel Atomic Force Microscope Systems
Date Issued
2007
Date
2007
Author(s)
Hung, Shao-Kang
DOI
en-US
Abstract
Three novel atomic force microscope (AFM) systems are proposed in this dissertation. The first one is a laser tracking type AFM. In this system, the laser detecting mechanism is specially designed to track the scanning probe, and then measure the deflection of the cantilever with minimized false deflection. Under such circumstance, the sample can be kept stationary, and the scanning speed will not be limited by the weight of the sample. Contrary to scanning probe notion, the second system proposed here is a scanning sample type AFM equipped with a CD/DVD pick-up-head (PUH) used to measure the deflection of the cantilever beam of the probe. Since the PUH is light enough to be carried for rapid scan, the third system developed in this research is back to a scanning probe type AFM. For this novel system, the sample is fully stationary, and there is no false deflection in this system.
To implement the above systems, we have designed an adaptive sliding-mode controller which replaces the traditional manually-tuned proportion-integration (PI) controller. Using this controller, any inexperienced user can still obtain high quality AFM images without difficulty. Next, a spiral scanning method is devised to realize a smooth circular scan. This novel method can achieve high speed scanning, low image distortion, and low damage to the piezoelectric scanner. Finally, to demonstrate the performance of the proposed systems, numerous experiments have been conducted. The experimental results show that he maximum transient tracking error is ±6 nm, the steady state error (topography resolution) is ±1 nm, and the imaging speed is 157 s/frame.
Subjects
原子力顯微鏡
適應性控制
滑動模式控制
螺旋掃描法
光碟讀取頭
雷射追蹤型原子力顯微鏡
掃樣品型原子力顯微鏡
掃針型原子力顯微鏡
atomic force microscope (AFM)
adaptive control
sliding-mode control
spiral scanning method
compact disk (CD)/ digital versatile disk (DVD) pickup head (PUH)
laser tracking type AFM
scanning sample type AFM
scanning probe type AFM
Type
thesis
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