The Fabrication and Electrical Characteristics of Orientation Controlled Silicon Nanowires
Date Issued
2006
Date
2006
Author(s)
Huang, Hao-Ming
DOI
en-US
Abstract
Orientation controlled silicon nanowires (SiNWs) have been synthesized under the effect of the electric field via low pressure chemical vapor deposition system. The p-type impurities are used to dope SiNWs and change their resistivity. The electrical characteristics of SiNWs with different doping concentrations are measured by four-points probe method. The possibility of application of SiNWs to the analog circuit is proposed.
Subjects
矽奈米線
silicon nanowires
Type
thesis
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