Structure and Elastic Properties of Amorphous SiCN Films

Journal

Physical review B

Journal Volume

64

Journal Issue

16

Pages

165305-1 - 165305-10

Date Issued

2001

Author(s)

G. Lehmann

P. Hess

J.-J. Wu

C. T. Wu

T. S. Wong

K. H. Chen

H.-Y. Lee

M. Amkreutz

Th. Frauenheim

DOI

https://doi.org/10.1103/PhysRevB.64.165305

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/503910

Publisher

American Physical Society

Type

journal article