An ultra-precision XYqZ piezo-micropositioner-Part I: design and analysis
Resource
IEEE Trans. Ultrasonics, Ferroelectrics, and Frequency Control 46 (4): 906-912
Journal
IEEE Trans. Ultrasonics, Ferroelectrics
Journal Issue
4
Pages
-
Date Issued
1999-07
Date
1999-07
Author(s)
Chang, S. H
Tseng, C. K.
Chien, H. C.
Type
journal article